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高純 CO2

我們可提供半導體級5N(99.999%UP) ~ 6N5(99.99995%UP)之高純CO2供客戶使用. 詳請請聯絡本公司,將有專人為您服務.


CO2 SPEC

 

Unit:

Molar ppm

5N

(HP)

   5N

(Electronic)

5N5

(UHP)

6N

(Research)

6N5

(SHP)

O2+Ar

<5.00

<2.00

<1.00

<0.20

<0.10

N2

-

<5.00

<2.00

<0.50

<0.20

H2

-

-

<0.05

<0.05

<0.05

CO

-

<0.50

<0.50

<0.10

<0.05

CH4

<5.00

<0.50

<0.50

<0.10

<0.10

THC

(as C3H8)

-

-

-

-

-

H2O

<1.00

<1.00

<1.00

<0.20

<0.20

  

                    Remark:  

                    “–“  :   Analysis but not showed on COA

                    HP  :   High Puirty

                    UHP :  Ultra High Purity

                    SHP :   Specially Manufactured High Purity

 

                   Cylinder Size:

                   DOT-044L:  27 kgs Filling

                   DOT-047L:  27 or 30 kgs Filling

                   Y-448L:     272 kgs Filling  

 

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